Semiconductor device processing technology trends in the VLSI era

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Bibliographic Details
Main Author:	Castellano, Robert N
Format:	Book
Published:	Philadelphia, Pa., U.S.A. Gordon and Breach Science Publishers 1993
Subjects:	Semiconductors > Design and construction Integrated circuits > Very large scale integration > Design and construction
Online Access:	Click Here to View Status and Holdings.
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090	0	0	\|a TK7871.85 \|b .C35 1993
100	1	#	\|a Castellano, Robert N
245	1	1	\|a Semiconductor device processing \|b technology trends in the VLSI era \|c Robert N. Castellano
260	#	#	\|a Philadelphia, Pa., U.S.A. \|b Gordon and Breach Science Publishers \|c 1993
300	#	#	\|a xix, 234 p. \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Semiconductors \|x Design and construction
650	#	0	\|a Integrated circuits \|x Very large scale integration \|x Design and construction
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=183512
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam