Semiconductor device processing technology trends in the VLSI era

Semiconductor device processing technology trends in the VLSI era

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Bibliographic Details
Main Author: Castellano, Robert N
Format: Book
Published: Philadelphia, Pa., U.S.A. Gordon and Breach Science Publishers 1993
Subjects:
Semiconductors > Design and construction
Integrated circuits > Very large scale integration > Design and construction
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xix, 234 p. ill. 24 cm
Bibliography:Includes bibliographical references and index
ISBN:2881245161

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