IEEE transactions on semiconductor manufacturing
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| Format: | Unknown |
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| Published: |
New York
Institute of Electrical and Electronics Engineers
19-
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | v. ill. 27 cm |
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| Publication Frequency: | Quarterly |
| ISSN: | 0894-6507 |
Semiconductor manufacturing technology Michael Quirk, Julian Serda