Optical diagnostics for thin film processing
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Main Author: | |
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Format: | Book |
Published: |
San Diego, CA
Academic Press
1996
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Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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Item Description: | Includes index |
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Physical Description: | xxix, 783 p. ill. 23 cm |
ISBN: | 0123420709 |