Fundamentals of semiconductor processing technology

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Bibliographic Details
Main Author:	El-Kareh, Badih
Format:	Unknown
Published:	Boston Kluwer Academic Publishers 1995
Subjects:	Semiconductors > Design and construction Manufacturing processes
Online Access:	Click Here to View Status and Holdings.
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001	wils-145243
090	0	0	\|a TK7871.85 \|b .E45 1995
100	1	#	\|a El-Kareh, Badih
245	1	1	\|a Fundamentals of semiconductor processing technology \|c by Badih El-Kareh \|f graphics and layout, Richard J. Bombard
260	#	#	\|a Boston \|b Kluwer Academic Publishers \|c 1995
300	#	#	\|a xii, 599 p. \|b ill. \|c 25 cm
500	#	#	\|a Cover title: Fundamentals of semiconductor processing technologies
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Semiconductors \|x Design and construction
650	#	0	\|a Manufacturing processes
745	#	#	\|a Fundamentals of semiconductor processing technologies
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=145243
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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