Fundamentals of semiconductor processing technology
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| Format: | Book |
| Published: |
Boston
Kluwer Academic Publishers
1995
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Item Description: | Cover title: Fundamentals of semiconductor processing technologies |
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| Physical Description: | xii, 599 p. ill. 25 cm |
| Bibliography: | Includes bibliographical references and index |
Semiconductor manufacturing technology