Process engineering analysis in semiconductor device fabrication

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Bibliographic Details
Main Author:	Middleman, Stanley
Other Authors:	Hochberg, Arthur K
Format:	Unknown
Published:	New York McGraw-Hill l993
Series:	McGraw-Hill chemical engineering series
Subjects:	Semiconductors > Design and construction
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 0070418535
090	0	0	\|a TK7871.85 \|b .M555 1993
100	1	#	\|a Middleman, Stanley
245	1	1	\|a Process engineering analysis in semiconductor device fabrication \|c Stanley Middleman, Arthur K. Hochberg
260	#	#	\|a New York \|b McGraw-Hill \|c l993
300	#	#	\|a xvii, 774 p. \|b ill. \|c 25 cm
490	1	#	\|a McGraw-Hill chemical engineering series
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Semiconductors \|x Design and construction
700	1	#	\|a Hochberg, Arthur K
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=139625
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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