Process engineering analysis in semiconductor device fabrication
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| Format: | Unknown |
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New York
McGraw-Hill
l993
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| Series: | McGraw-Hill chemical engineering series
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xvii, 774 p. ill. 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0070418535 |
Fundamentals of semiconductor fabrication 
Fundamentals of semiconductor fabrication