Chemical vapor deposition of refractory metals and ceramics II proceedings held December 4-6, l99l, Boston, Massachusetts, U.S.A.

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Bibliographic Details
Corporate Author: Symposium on Chemical vapor deposition of refractory metals and ceramics II
Other Authors: Besmann, Theodore M, Gallois, Bernard M
Format: Book
Published: Pittsburgh, Pa. Materials Research Society l992
Series:Materials Research Society symposium proceedings v.250
Subjects:
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