Trends in ion implantation

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Bibliographic Details
Other Authors: Van Rossum, Marc
Format: Book
Published: Brookfield, V.T. Trans Tech Publications 1992
Series:Solid state phenomena v. 27
Subjects:
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:202 p. ill. 23 cm
Bibliography:Includes bibliographical references
ISBN:0878496440