Trends in ion implantation
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| Other Authors: | |
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| Format: | Unknown |
| Published: |
Brookfield, V.T.
Trans Tech Publications
1992
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| Series: | Solid state phenomena
v. 27 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | 202 p. ill. 23 cm |
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| Bibliography: | Includes bibliographical references |
| ISBN: | 0878496440 |
Principles and applications of ion scattering spectrometry