Microcircuit engineering 91. PROCEEDINGS OF THE ...

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Bibliographic Details
Corporate Author:	International Conference on Microlithography
Other Authors:	Tucciarane, A, Paoletti, A, Paroli, P
Format:	Book
Published:	Amsterdam Elsevier 1992
Subjects:	Microelectronics > Congresses
Online Access:	Click Here to View Status and Holdings.
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090	0	0	\|a TK7874 \|b .I58 1992
110	1	#	\|a International Conference on Microlithography \|j Rome, Italy \|k 1991
245	1	1	\|a Microcircuit engineering 91. PROCEEDINGS OF THE ... \|c edited by A. Tucciarone, A. Paoletti, P. Paroli
260	#	#	\|a Amsterdam \|b Elsevier \|c 1992
300	#	#	\|a xvii, 581 p. \|b ill. \|c 27 cm
500	#	#	\|a Includes index
650	#	0	\|a Microelectronics \|x Congresses
700	1	#	\|a Tucciarane, A
700	#	#	\|a Paoletti, A
700	#	#	\|a Paroli, P
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