Microcircuit engineering 91. PROCEEDINGS OF THE ...

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Bibliographic Details
Corporate Author: International Conference on Microlithography
Other Authors: Tucciarane, A, Paoletti, A, Paroli, P
Format: Unknown
Published: Amsterdam Elsevier 1992
Subjects:
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Description
Item Description:Includes index
Physical Description:xvii, 581 p. ill. 27 cm
ISBN:0444895094