Photons and low energy particles in surface processing proceedings of the ... held December 3-6, 1991

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Bibliographic Details
Corporate Authors:	Symposium on Photons and Low Energy Particles in Surface Processing, Materials Research Society
Other Authors:	Ashby, Carol Iris Hill 1953-, Brannon, James H, Pang, Stella W
Format:	Book
Published:	Pittsburgh, Pa. Materials Research Society 1992
Series:	Materials Research Society symposium proceedings v.236
Subjects:	Surfaces (Technology) > Congresses Plasma etching > Congresses Lasers > Industrial applications > Congresses
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 1558991301
090	0	0	\|a TA418.7 \|b .S96 1992
110	1	#	\|a Symposium on Photons and Low Energy Particles in Surface Processing \|j Boston, Massachusetts \|k 1991
245	1	1	\|a Photons and low energy particles in surface processing \|b proceedings of the ... held December 3-6, 1991 \|c editors, Carol I. H. Ashby, James H. Brannon, Stella W. Pang
260	#	#	\|a Pittsburgh, Pa. \|b Materials Research Society \|c 1992
300	#	#	\|a xv, 552 p. \|b ill. \|c 24 cm
490	1	#	\|a Materials Research Society symposium proceedings \|v v.236
504	#	#	\|a Includes bibliographical references and indexes
650	#	0	\|a Surfaces (Technology) \|x Congresses
650	#	0	\|a Plasma etching \|x Congresses
650	#	0	\|a Lasers \|x Industrial applications \|x Congresses
700	1	#	\|a Ashby, Carol Iris Hill \|c 1953-
700	#	#	\|a Brannon, James H
700	#	#	\|a Pang, Stella W
710	1	#	\|a Materials Research Society
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=103140
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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