Photons and low energy particles in surface processing proceedings of the ... held December 3-6, 1991

Photons and low energy particles in surface processing proceedings of the ... held December 3-6, 1991

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Bibliographic Details
Corporate Authors: Symposium on Photons and Low Energy Particles in Surface Processing, Materials Research Society
Other Authors: Ashby, Carol Iris Hill 1953-, Brannon, James H, Pang, Stella W
Format: Book
Published: Pittsburgh, Pa. Materials Research Society 1992
Series:Materials Research Society symposium proceedings v.236
Subjects:
Surfaces (Technology) > Congresses
Plasma etching > Congresses
Lasers > Industrial applications > Congresses
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xv, 552 p. ill. 24 cm
Bibliography:Includes bibliographical references and indexes
ISBN:1558991301

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