Microlithography process technology for IC fabrication

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Bibliographic Details
Main Author:	Elliott, David J
Format:	Book
Language:	English
Published:	New York McGraw-Hill 1986
Subjects:	Microlithography Photoresists Integrated circuits > Very large scale integration > Design and construction
Online Access:	Click Here to View Status and Holdings.
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100	1	#	\|a Elliott, David J
245	1	1	\|a Microlithography \|b process technology for IC fabrication \|c David J. Elliott
260	#	#	\|a New York \|b McGraw-Hill \|c 1986
300	#	#	\|a xix, 378 p. \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographies and index.
650	#	1	\|a Microlithography
650	#	#	\|a Photoresists
650	#	#	\|a Integrated circuits \|x Very large scale integration \|x Design and construction
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=050111
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